Liquid Crystal Polymer for Mounting X-ray Window

ABSTRACT

An x-ray window can include an adhesive layer sandwiched between and providing a hermetic seal between a thin film and a housing. The adhesive layer can include liquid crystal polymer. The liquid crystal polymer can be opaque, gas-tight, made of low atomic number elements, able to withstand high temperature, low outgassing, low leakage, able to relieve stress in the x-ray window thin film, capable of bonding to many different materials, or combinations thereof.

CLAIM OF PRIORITY

This application is a continuation of U.S. patent application Ser. No.17/210,299, filed on Mar. 23, 2021, which is a continuation of U.S.patent application Ser. No. 16/433,202, filed on Jun. 6, 2019, whichclaims priority to U.S. Provisional Patent Application No. 62/694,503,filed on Jul. 6, 2018, which are incorporated herein by reference.

FIELD OF THE INVENTION

The present application is related generally to x-ray windows.

BACKGROUND

A hermetic seal in an x-ray window can have demanding requirements. Forexample, light penetration through the hermetic seal into an interior ofan x-ray detection device can result in interference with a signal froma sample. Thus, it can be helpful for the hermetic seal to be opaque.X-ray fluorescence from the hermetic seal can interfere with the signalfrom the sample, particularly x-ray fluorescence from high atomic numberelements in the hermetic seal. Therefore, it can be helpful for thehermetic seal to be made of low atomic number elements.

Many x-ray devices have an internal vacuum and a getter for maintainingthis vacuum. Such getters are typically activated more quickly at highertemperatures. Therefore, it can be helpful for the hermetic seal to beable to withstand high temperature. Outgassing of components of suchx-ray devices can result in an undesirable rise of internal pressure.Thus, low outgassing of the hermetic seal can also be a usefulcharacteristic. Even small leakage through components of the x-raydevice can gradually cause an undesirable rise of internal pressure andmalfunctioning of the device. Therefore, it can also be useful for thehermetic seal to have a low leak rate.

An x-ray window thin film can develop internal stress during manufactureor use due to coefficient of thermal expansion mismatch between thex-ray window thin film and a housing to which it is bonded. It can behelpful for the hermetic seal to relieve such stress.

Many different materials are used for the x-ray window thin film and thex-ray device housing. It can be useful for the hermetic seal to becapable of bonding to a large variety of materials.

SUMMARY

It has been recognized that it would be advantageous to provide ahermetic seal for an x-ray window which is opaque, which is made of lowatomic number elements, which can withstand high temperature, with lowoutgassing, with low leakage, which is able to relieve stress in thex-ray window thin film, and which can bond to many different materials.The present invention is directed to various embodiments of x-raywindows, and methods of making x-ray windows, that satisfy these needs.Each embodiment may satisfy one, some, or all of these needs.

The x-ray window can comprise a thin film configured for transmission ofx-rays, a housing, and an adhesive layer sandwiched between andproviding a hermetic seal between the thin film and the housing. Theadhesive layer can include liquid crystal polymer.

BRIEF DESCRIPTION OF THE DRAWINGS (Drawings Might Not Be Drawn to Scale)

FIG. 1 is a schematic, cross-sectional side-view of an x-ray window 10including an adhesive layer 14 sandwiched between and providing ahermetic seal between a thin film 13 and a housing 11, in accordancewith an embodiment of the present invention.

FIG. 2 is a schematic, cross-sectional side-view of an x-ray window 20including an adhesive layer 14 sandwiched between and providing ahermetic seal between a thin film 13 and a flange 11 _(F) of a housing11, and a ribbed support structure 24 sandwiched between the thin film13 and the adhesive layer 14, in accordance with an embodiment of thepresent invention.

FIGS. 3-5 are schematic perspective-views illustrating a method ofmaking an x-ray window 50, in accordance with an embodiment of thepresent invention.

FIGS. 6-8 are schematic, cross-sectional side-views of x-ray windows 60,70, and 80 including the thin film 13 sandwiched between a pair ofadhesive layers 64, and hermetically sealed to the housing 11 by one orboth of the adhesive layers 64, in accordance with embodiments of thepresent invention.

DEFINITIONS

As used herein, the term “adjoin” means direct and immediate contact.

As used herein, the term “annular” means ring-shaped, but is not limitedto a circular shape. The annular shape can have other curved shapes,such as for example elliptical.

As used herein, “cps” means centipoise.

As used herein, “KPa” means kilopascals, “MPa” means megapascals, and“GPa” means gigapascals.

As used herein, in the unit “mbar*L/sec”, “mbar” means millibars, eachmillibar equal to 100 pascals, “L” means liters, and “sec” means second.

As used herein, “nm” means nanometer(s) and “pm” means micrometer(s).

DETAILED DESCRIPTION

As illustrated in FIGS. 1, 2, and 5, x-ray windows 10, 20, and 50,respectively, are shown comprising an adhesive layer 14 sandwichedbetween and providing a hermetic seal between a thin film 13 and ahousing 11. The thin film 13 can extend across an aperture 11 _(A) ofthe housing 11. The thin film 13 and the housing 11 can adjoin theadhesive layer 14.

The adhesive layer 14 can be or can include epoxy, liquid crystalpolymer, or other type of adhesive. For example, ≥50%, ≥75%, ≥90%, ≥95%,≥99%, or 100% of the adhesive layer 14 can be liquid crystal polymer.The adhesive layer 14 can have certain characteristics for improvedperformance as will be described in the following few paragraphs.

As illustrated in FIG. 2, x-ray window 20 can further comprise a ribbedsupport structure 24, providing structural support to the thin film 13,and sandwiched between the thin film 13 and the adhesive layer 14. Theribbed support structure 24 can extend across the aperture 11 _(A) ofthe housing 11, and can provide support for the thin film 13 across theaperture 11 _(A) of the housing 11. The thin film 13, the adhesive layer14, or both can adjoin the ribbed support structure 24. Alternatively,there can be other or additional materials between the thin film 13 andthe adhesive layer 14. There can also be other materials between thehousing 11 and the adhesive layer 14. The ribbed support structure 24can comprise silicon.

If the adhesive layer 14 is not viscous enough, it can wick intochannels of the ribbed support structure 24. The adhesive layer 14 insuch channels can damage the ribbed support structure 24. The adhesivelayer 14 in such channels can block or fluoresce x-rays, which caninterfere with an x-ray signal from a sample. Therefore, it can behelpful for the adhesive layer 14 to have high viscosity. Exampleviscosity values of the adhesive layer 14 include ≥10,000 cps, ≥50,000cps, ≥80,000 cps, ≥100,000 cps, ≥200,000 cps, or ≥250,000 cps and≤400,000 cps, ≤600,000 cps, or ≤1,000,000 cps, each at 300° C. Allviscosity values herein are static viscosity.

For improved bonding of the thin film 13 to the housing 11, the adhesivelayer 14 can have shear thinning properties, with non-Newtonian behaviorand a reduction of viscosity when under shear stress.

As illustrated in FIGS. 1 and 2, the x-ray windows 10 or 20 can be partof an x-ray device, such as for example an x-ray detection device or anx-ray tube. An x-ray component 12, which can be an x-ray detector or anelectron emitter, can be located at least partially within an interior11 ₁ of the housing 11 and can face the x-ray window 10 or 20.

These x-ray devices typically have a vacuum in the interior 11 ₁ of thehousing 11. A getter is commonly used to achieve and maintain thisvacuum. Because the getter is more quickly activated at highertemperatures, manufacturing time can be reduced if the thin film 13 issealed to the housing 11 at a high temperature. Therefore, it can beuseful for the adhesive layer 14 to be able to withstand hightemperature without degradation. It can be useful for the adhesive layer14 to have a high melting temperature, or if the adhesive layer 14 is aliquid crystal polymer, to have a high transition temperature T_(LC)(temperature of transition between solid and liquid crystal states).Example transition temperature T_(LC) values of the liquid crystalpolymer include ≥200° C., ≥260° C., ≥270° C., ≥300° C., ≥350° C., or≥400° C. and ≤500° C., ≤600° C., or ≤800° C.

Visible or infrared light can interfere with operation of the x-raycomponent 12, such as an x-ray detector. Therefore, it can be helpfulfor the adhesive layer 14 to be opaque. For example, transmissivity oflight, with a wavelength of 550 nm, with a wavelength of 800 nm, orboth, through the adhesive layer 14 into the interior 11 ₁ of thehousing 11, can be of ≤10%, ≤3%, or ≤2%.

The adhesive layer 14 can have a low Young's Modulus, low tensilestrength and high elongation to compensate for a mismatch of thecoefficient of thermal expansion between the thin film 13 and thehousing 11. Such properties can allow flexure of the adhesive layer 14when the thin film 13 and the housing 11 expand or contract at differentrates during temperature changes, thus avoiding window fracture ordistortion.

Example Young's Modulus values of the adhesive layer 14 include ≥100MPa, ≥500 MPa, or ≥1 GPa and ≤2 GPa, ≤5 GPa, ≤8 GPa, or ≤12 GPa, each at25° C. Example tensile strength values of the adhesive layer 14 include≥100 MPa, ≥125 MPa, ≥150 MPa, or ≥175 MPa and ≤200 MPa, ≤225 MPa, ≤250MPa, or ≤300 MPa, each at 25° C. Each of these tensile strength valuescan be for machine direction (roll-out direction of the liquid crystalpolymer), transverse direction (transverse to the machine direction /roll-out direction), or both.

Elongation is strain before failure in tensile testing. Elongation isequal to (final length−initial length)/initial length. Exampleelongation values of the adhesive layer 14 include ≥10%, ≥20%, or ≥30%and ≤40%, ≤50%, or ≤60%, each at 25° C.

The adhesive layer 14 can have isotropic properties, depending on itsmethod of manufacture. Anisotropy of the adhesive layer 14 close orequal to zero might be preferable for uniform bond characteristics. Forexample, anisotropy of the adhesive layer 14 can be ≤300 MPa, ≤250 MPa,≤200 MPa, ≤150 MPa, ≤100 MPa, ≤75 MPa, ≤50 MPa, or ≤25 MPa, each at 25°C. Anisotropy is calculated by subtracting tensile strength in thetransverse direction from tensile strength in the machine direction.

The thin film 13 and the housing 11 can have low coefficient of thermalexpansion values. It can be helpful for the adhesive layer 14 to have acoefficient of thermal expansion close to that of the thin film 13, thehousing 11, or both. Example coefficient of thermal expansion values ofthe adhesive layer 14 include ≥0 m/(m*K), ≥10⁻⁶ m/(m*K), or ≥2×10⁻⁶m/(m*K) and ≤5×10⁻⁶ m/(m*K), ≤10×10⁻⁶ m/(m*K), ≤20×10⁻⁶ m/(m*K),≤30×10⁻⁶ m/(m*K), ≤35×10⁻⁶ m/(m*K), ≤40×10⁻⁶ m/(m*K), or ≤45×10⁻⁶m/(m*K), each at 25° C.

It can be helpful for the adhesive layer 14 to have low outgassing undervacuum after bonding. This property can avoid reduction of an internalvacuum of the final device. Weight loss of the heated adhesive layer 14can be used to quantify outgassing. For example, weight loss of theadhesive layer 14, prior to placing the adhesive layer 14 between thethin film 13 and the housing 11, can be ≤5%, ≤3%, ≤2%, ≤1%, ≤0.7%, or≤0.6%, at a temperature of 225° C. during a 24 hour period.

Use of a liquid crystal polymer as the adhesive layer 14 can provide astrong hermetic seal between many different x-ray window thin film 13materials and many different housing materials, thus reducing gasleakage through the hermetic seal. For example, liquid crystal polymerscan bond effectively to silicon, boron, aluminum, stainless steel,nickel, copper, or combinations thereof. The thin film 13, the housing11, or both can include one or more of these materials. Examples of theleak tightness of the x-ray windows 10, 20, and 50 described hereininclude average helium leak rate of ≤10⁻⁹ mbar*L/sec, ≤10⁻¹⁰ mbar*L/sec,or ≤3×10⁻¹⁰ mbar*L/sec, at a temperature of 25° C., for at least thefirst 10 hours after forming the hermetic seal.

X-ray windows are commonly used with x-ray detection devices. X-rayfluorescence from material other than the sample measured/detected caninterfere with the x-ray signal from the sample. This problem is usuallyworse if such interfering x-ray fluorescence is from a material withhigh atomic number. Therefore, it can be helpful if the adhesive layer14 is made of material(s) with low atomic numbers. For example, ≥70%,≥80%, ≥90%, or ≥95% of the atoms in the adhesive layer 14 can have anatomic number ≤6. As another example, ≥90%, ≥95%, ≥99%, or 100% of theatoms in the adhesive layer 14 can have an atomic number≤8. Therefore,the adhesive layer 14 can be made primarily of carbon (Z=6), hydrogen(Z=1), and oxygen (Z=8).

Various types of liquid crystal polymer can be used as the adhesivelayer 14 in the embodiments described herein. For example, the liquidcrystal polymer can be main chain, side chain, linear, cyclic, branched,crosslinked, or combinations thereof. The liquid crystal polymer can bethermotropic or lyotropic. The liquid crystal polymer can be an aromaticpolyester. The polymer of the liquid crystal polymer can be formed fromthe following monomers: 4-hydroxybenzaldehyde,6-hydroxy-2-naphthaldehyde, 4,4′-biphenol, terephthalaldehyde,ethane-1,2-diol, or combinations thereof. The mesogen used in formationof the liquid crystal polymer can be disc-like, rod-like, amphiphilic,or combinations thereof. The liquid crystal polymers 14 can form regionsof highly ordered structure while in the liquid phase.

Proper selection of a width of a mounting surface can improve bonding,reduce leakage, and reduce cost. As illustrated in FIG. 2 on x-raywindow 20, the housing 11 can have a flange 11 _(F) encircling anaperture 11 _(A). The adhesive layer 14 can be located on the flange 11_(F) and can have an annular shape encircling the aperture 11 _(A) ofthe housing 11. Although x-ray window 20 in FIG. 2 shows mounting on anexterior of the flange 11 _(F), this invention is equally applicable toa mount on an inside of the flange 11 _(F), at an interior 11 _(I) ofthe housing 11. Example widths W₁₄ of the adhesive layer 14 on theflange 11 _(F) include ≥0.5 mm, ≥1 mm, or ≥3 mm and ≤7 mm, ≤10 mm, ≤15mm, or ≤50 mm. In addition, the adhesive layer 14 between the thin film13 and the housing 11 can have a thickness Th₁₄ of ≥10 μm and ≤500 μm.

It can be useful for the thin film 13 to be strong (especially strongenough to withstand a differential pressure of 1 atm) and allow a highpercent transmission of x-rays. The thin film 13 can have sufficientthickness for strength, but not have a thickness that will causeexcessive attenuation of x-rays. For example, the thin film 13 can havea thickness Th₁₃ of ≤0.01 micrometers, ≥0.2 micrometers, ≥10micrometers, or ≥100 micrometers; and ≤500 micrometers, ≤1 millimeter,or ≤5 millimeters. The thickness can depend on material of construction,span-width, differential-pressure, and application. Material ofconstruction for the thin film 13 can include or consist of materialswith an atomic number≤14, ≤6, ≤4; and can include beryllium, hydrogen,oxygen, carbon, silicon, and nitrogen.

A differential pressure across the thin film 13 (e.g. a vacuum on oneside and air or vacuum on an opposite side) can cause it to bow ordeflect excessivley, damaging the x-ray window, and also possiblycausing a short circuit by creating an unintended electrical-currentpath, or, for an x-ray tube, a change in electron-beam focusing. Thus,it can be useful to minimize the deflection distance. The thin film 13described herein can be made sufficiently strong and thus can have arelatively small deflection distance. For example, the thin film 13 canhave a deflection distance of ≤400 micrometers, ≤300 micrometers, ≤200micrometers, or ≤100 micrometers, with one atmosphere differentialpressure across the thin film 13.

It can be useful for x-ray windows to have a high transmissivity ofx-rays, including a high transmission of low-energy x-rays. The thinfilm 13 described herein can have a high transmissivity of x-rays. Forexample, the thin film 13 can have a transmissivity of ≥50%, ≥60%, ≥70%,≥74%, or ≥80% for x-rays having an energy of 1.74 keV.

For some applications, it can be useful for x-ray windows to blockvisible and infrared light transmission in order to avoid creatingundesirable noise in sensitive instruments. For example, the thin film13 described herein can have a transmissivity of ≤10%, ≤3%, or ≤2% forvisible light at a wavelength of 550 nanometers and/or a transmissivityof ≤10%, ≤4%, or ≤3% for infrared light at a wavelength of 800nanometers.

The thin film 13 can include some or all of the properties (e.g. lowdeflection, high x-ray transmissivity, low visible and infrared lighttransmissivity) of the x-ray windows described in U.S. Pat. No.9,502,206, which is incorporated herein by reference in its entirety.

Method

A method of making an x-ray window 50 can comprise some or all of thefollowing steps, which are illustrated in FIGS. 3-5. These steps can beperformed in the following order or other order if so specified. Theremay be additional steps not described below. These additional steps maybe before, between, or after those described. The x-ray window 50 andits components can have properties as described above for the x-raywindows 10 or 20.

The method can include placing an adhesive layer 14 between a thin film13 and a housing 11. Another step in the method can be applying apressure P to press the thin film 13 and the housing 11 towards eachother and towards the adhesive layer 14 sandwiched between them. Anadditional step in the method can be heating the x-ray window, such asfor example in oven 51. Applying the pressure P and heating can be donesimultaneously or sequentially. For example, a small weight can beplaced on the thin film 13 and the housing 11.

Pressure, duration under such pressure, and temperature can be adjustedfor optimal bonding and throughput. Increased pressure can reduceprocessing time and increase bond strength, but can result in damage tosensitive components or undesirable thinning of the adhesive layer 14.Examples of pressure ranges, particularly applicable if the adhesivelayer 14 is liquid crystal polymer, include ≥0.01 KPa, ≥0.1 KPa, ≥0.15KPa, ≥0.2 KPa, ≥0.5 KPa, ≥1 KPa, or ≥5 KPa and ≤10 KPa, ≤20 KPa, ≤30KPa, ≤50 KPa, or ≤100 KPa.

Increased temperature can reduce processing time and better fill gapsand holes in the bonded materials, but can result in thermal damage tothe adhesive layer 14 or other x-ray window components. The optimaltemperature can be selected based on applied pressure P, processingtime, temperature sensitivity of components, and desired bondingstrength. For example, the x-ray window 50, with liquid crystal polymeras the adhesive layer 14, can be heated to a temperature above thetransition temperature T_(LC) of the liquid crystal polymer. Forexample, the x-ray window 50 can be heated≥10° C., ≥50° C., or ≥70° C.above the transition temperature T_(LC) of the liquid crystal polymer.Further, the x-ray window 50 can be heated≤90° C., ≤100° C., or ≤150° C.above the transition temperature T_(LC) of the liquid crystal polymer.As another example, the x-ray window 50 can be heated to a temperatureof ≥100° C., ≥150° C., ≥200° C., ≥250° C., or ≥300° C. and ≤350° C.,≤400° C., ≤500° C., or ≤600° C.

A slow cure at a relatively lower temperature and pressure can result inan improved bond, but can increase cost due to reduced throughput.Examples of processing time (time during which the x-ray window 50 ismaintained under pressure P and heat) include 5 minutes, ≥15 minutes,≥20 minutes, ≥30minutes, or ≥1 hour and ≤2 hours, ≤3 hours, ≤4.5 hours,≤6 hours, or ≤10 hours.

The liquid crystal polymer can be initially dissolved in a solvent. Thesolution (liquid crystal polymer and solvent) can be applied to the thinfilm 13, the housing 11, or both, then baked to remove the solvent andbond the thin film 13 to the housing 11. Alternatively, the liquidcrystal polymer can be in pellet form, which can be pressed and placedonto the thin film 13, the housing 11, or both, then baked. The liquidcrystal polymer can be formed into a sheet/film. This sheet/film canthen be cut to shape and placed on the thin film 13 or the housing 11.The thin film 13 and the housing 11 can be pressed together with theliquid crystal polymer between, then baked. A choice between thesemethods can be based on manufacture cost of the liquid crystal polymer,final bond strength, manufacture cost of the x-ray window, and isotropicproperties of the liquid crystal polymer.

X-Ray Window with Mirror-Image Bond

As illustrated in FIGS. 6, 7, and 8, x-ray windows 60, 70, and 80,respectively, are shown comprising a housing 11 including a flange 11_(F) encircling an aperture 11 _(A), a thin film 13, and a pair ofadhesive layers 64. The thin film 13 can be sandwiched between the pairof adhesive layers 64, and can be hermetically sealed to the housing 11by one or both of the adhesive layers 64. The pair of adhesive layers 64can be pressed and cured together as described above in the Methodsection. Use of two adhesive layers 64 can balance compressive stress inthe thin film 13, and can improve leak tightness of the x-ray window.

As illustrated in FIG. 6, one or both of the adhesive layers 64 can be asheet extending across the aperture 11A of the housing 11. Asillustrated in FIGS. 7 and 8, one or both of the adhesive layers 64 canhave an annular shape with an aperture. The aperture of the adhesivelayers 64 can encircle the aperture 11 _(A) of the housing 11. Theaperture of the adhesive layers 64 can be aligned with the aperture 11_(A) of the housing 11. A decision between these different embodimentscan be made based on cost, manufacturability, x-ray attenuation by theadhesive layers 64, and leak-tightness.

As illustrated in FIGS. 6 and 7, the thin film 13 and the pair ofadhesive layers 64 can be mounted inside of the flange 11 _(F) of thehousing 11. As illustrated in FIG. 8, the thin film 13 and the pair ofadhesive layers 64 can be mounted outside of the flange 11 _(F) of thehousing 11. See US Patent Publication Numbers US 2014/0008538 and US2018/0323033 for additional information about the advantages of mountinginside or outside of the flange.

The adhesive layer 14 described above can be one layer of the pair ofadhesive layers 64, specifically a proximal adhesive layer 14 _(p),closer to the housing 11 than the other layer, the distal adhesive layer14 _(d). The proximal adhesive layer 14 _(p), the distal adhesive layer14 _(d), or both, can have properties as described above for theadhesive layer 14. The pair of adhesive layers 64 can have a samematerial composition with respect to each other. The housing 11 and thethin film 13 can also have properties as described above. The thin film13 can be sandwiched between the proximal adhesive layer 14 _(p) and thedistal adhesive layer 14 _(d).

The x-ray window can further comprise a ring 61 located at an oppositeside of the distal adhesive layer 14 _(d) from the thin film 13. Thus,the distal adhesive layer 14 _(d) can be sandwiched between the ring 61and the thin film 13. In one embodiment, the ring 61 can be metallic.The ring can comprise an iron-nickel-cobalt alloy, such as for exampleKovar (ASTM F 15 Alloy). In order to avoid thermal expansion mismatch,the ring 61 and the housing 11 can have a same material composition withrespect to each other. Thus, both can be metallic, both can comprise aniron-nickel-cobalt alloy, or both can include Kovar. Use of the ring 61can improve bonding the hermetic seal.

What is claimed is:
 1. A method of making an x-ray window, the methodcomprising: placing a liquid crystal polymer between a thin film and ahousing, the liquid crystal polymer being thermotropic, and the liquidcrystal polymer includes an aromatic polyester; pressing the thin filmand the housing towards each other and towards the liquid crystalpolymer sandwiched between them; and heating the x-ray window.
 2. Themethod of claim 1, wherein heating the x-ray window includes heating toa temperature of ≥250° C. and ≤500° C.
 3. The method of claim 2, whereinheating the x-ray window includes maintaining the x-ray window at thetemperature for a time of ≥30 minutes and ≤6 hours.
 4. The method ofclaim 1, wherein the thin film and the housing are pressed towards eachother and towards the liquid crystal polymer with a pressure of ≥1 KPaand ≤50 KPa.
 5. The method of claim 1, wherein the thin film and thehousing are pressed towards each other and towards the liquid crystalpolymer with a pressure of ≥1 KPa.
 6. The method of claim 1, whereinweight loss of the liquid crystal polymer, prior to placing the liquidcrystal polymer between the thin film and the housing, is ≤1% at atemperature of 225° C. during a 24 hour period.
 7. A method of making anx-ray window, the method comprising: placing a liquid crystal polymerbetween a thin film and a housing, the liquid crystal polymer includesan aromatic polyester; pressing the thin film and the housing towardseach other and towards the liquid crystal polymer sandwiched betweenthem; and heating the x-ray window.
 8. The method of claim 7, whereinheating the x-ray window includes heating to a temperature of ≥250° C.and ≤500° C.
 9. The method of claim 8, wherein heating the x-ray windowincludes maintaining the x-ray window at the temperature for a time of≥30 minutes and ≤6 hours.
 10. The method of claim 7, wherein the thinfilm and the housing are pressed towards each other and towards theliquid crystal polymer with a pressure of ≥1 KPa and ≤50 KPa.
 11. Themethod of claim 7, wherein the thin film and the housing are pressedtowards each other and towards the liquid crystal polymer with apressure of ≥1 KPa.
 12. The method of claim 7, wherein weight loss ofthe liquid crystal polymer, prior to placing the liquid crystal polymerbetween the thin film and the housing, is ≤1% at a temperature of 225°C. during a 24 hour period.
 13. A method of making an x-ray window, themethod comprising: placing a liquid crystal polymer between a thin filmand a housing, the liquid crystal polymer being thermotropic; pressingthe thin film and the housing towards each other and towards the liquidcrystal polymer sandwiched between them; and heating the x-ray window.14. The method of claim 13, wherein weight loss of the liquid crystalpolymer, prior to placing the liquid crystal polymer between the thinfilm and the housing, is ≤1% at a temperature of 225° C. during a 24hour period.
 15. The method of claim 13, wherein heating the x-raywindow includes heating to a temperature above the melting point of theliquid crystal polymer.
 16. The method of claim 13, wherein heating thex-ray window includes heating to a temperature above the glasstransition temperature of the liquid crystal polymer.
 17. The method ofclaim 13, wherein heating the x-ray window includes heating to atemperature of ≥250° C. and ≤500° C.
 18. The method of claim 17, whereinheating the x-ray window includes maintaining the x-ray window at thetemperature for a time of ≥30 minutes and ≤6 hours.
 19. The method ofclaim 13, wherein the thin film and the housing are pressed towards eachother and towards the liquid crystal polymer with a pressure of ≥1 KPaand ≤50 KPa.
 20. The method of claim 13, wherein the thin film and thehousing are pressed towards each other and towards the liquid crystalpolymer with a pressure of ≥1 KPa.